Wet Oxidation Process
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YouTubeSupport Center for Microsystems Education
Wet Oxidation Process
This animation illustrates the chemistry of a wet thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a wet oxidation process, water vapor (H2O) interacts with the silicon atoms at the SiO2-Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS ...
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